TY  - JOUR
AU  - John Dagata
AU  - W. Tseng
AU  - J. Bennett
AU  - E. Dobisz
AU  - J. Schneir
AU  - Howard Harary
C2  - Journal of Vacuum Science and Technology
DA  - 1992-08-01 00:08:00
LA  - en
M1  - A 10
PB  - Journal of Vacuum Science and Technology
PY  - 1992
TI  - Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing
ER  -