TY  - JOUR
AU  - Dagata, John
AU  - Tseng, W.
AU  - Bennett, J.
AU  - Dobisz, E.
AU  - Schneir, J.
AU  - Harary, Howard
C2  - Journal of Vacuum Science and Technology
DA  - 1992-08-01 00:08:00
LA  - en
M1  - A 10
PB  - Journal of Vacuum Science and Technology
PY  - 1992
TI  - Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing
ER  -