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PUBLICATIONS

Integrating carbon nanotubes as vias in a monolithic 3DIC process

Published

Author(s)

Ann C. Chiaramonti Debay, Sten Vollebregt, R. Ishihara, Johan van der Cingel , Kees Beenakker
Proceedings Title
2012 International Conference on Solid State Devices and Materials
Conference Dates
September 25-27, 2012
Conference Location
Kyoto
Pub Type
Conferences
Semiconductors, Materials, Polymers and Nanomaterials

Citation

Chiaramonti, A. , Vollebregt, S. , Ishihara, R. , van, J. and Beenakker, K. (2013), Integrating carbon nanotubes as vias in a monolithic 3DIC process, 2012 International Conference on Solid State Devices and Materials, Kyoto, -1 (Accessed October 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 21, 2013, Updated February 19, 2017
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