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Integrating carbon nanotubes as vias in a monolithic 3DIC process

Published

Author(s)

Ann C. Chiaramonti Debay, Sten Vollebregt, R. Ishihara, Johan van der Cingel , Kees Beenakker
Proceedings Title
2012 International Conference on Solid State Devices and Materials
Conference Dates
September 25-27, 2012
Conference Location
Kyoto

Citation

Chiaramonti, A. , Vollebregt, S. , Ishihara, R. , van, J. and Beenakker, K. (2013), Integrating carbon nanotubes as vias in a monolithic 3DIC process, 2012 International Conference on Solid State Devices and Materials, Kyoto, -1 (Accessed June 15, 2024)

Issues

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Created March 21, 2013, Updated February 19, 2017