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Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines

Published

Author(s)

Uwe Arz, Hartmut Grabinski, Dylan Williams

Abstract

This work investigates the broadband propagation characteristics of transmission lines fabricated on silicon substrates of different conductivities. We compare calculations to measurements and examine the sensitivity of the frequency-dependent line parameters to substrate conductivity.
Proceedings Title
ARFTG Conference Digest-Spring, 54th (Volume: 36)
Volume
36
Conference Dates
December 2-3, 1999
Conference Location
Atlanta, GA, US
Conference Title
54th ARFTG Conference Digest

Keywords

electromagnetic simulation, equivalent-circuit parameters, measurement, silicon substrate effect, transmission line

Citation

Arz, U. , Grabinski, H. and Williams, D. (1999), Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines, ARFTG Conference Digest-Spring, 54th (Volume: 36), Atlanta, GA, US, [online], https://doi.org/10.1109/ARFTG.1999.327364, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24545 (Accessed March 2, 2024)
Created November 30, 1999, Updated October 12, 2021