@conference{812861,
  author = {Uwe Arz and Hartmut Grabinski and Dylan Williams},
  title = {Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines},
  year = {1999},
  number = {36},
  month = {1999-12-01 00:12:00},
  publisher = {ARFTG Conference Digest-Spring, 54th (Volume: 36), Atlanta, GA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24545},
  doi = {https://doi.org/10.1109/ARFTG.1999.327364},
  language = {en},
}