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Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges

Published

Author(s)

Richard J. Van Brunt, James K. Olthoff, S. B. Radovanov
Proceedings Title
Proc. XXII Intl. Conf. on Phenomena in Ionized Gases
Conference Dates
July 31-August 5, 1995
Conference Location
Hoboken, NJ

Citation

Van Brunt, R. , Olthoff, J. and Radovanov, S. (1995), Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges, Proc. XXII Intl. Conf. on Phenomena in Ionized Gases, Hoboken, NJ, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20677 (Accessed April 19, 2024)
Created July 31, 1995, Updated October 12, 2021