TY  - CONF
AU  - Richard Van Brunt
AU  - James Olthoff
AU  - S. Radovanov
C2  - Proc. XXII Intl. Conf. on Phenomena in Ionized Gases, Hoboken, NJ
DA  - 1995-08-01 00:08:00
LA  - en
PB  - Proc. XXII Intl. Conf. on Phenomena in Ionized Gases, Hoboken, NJ
PY  - 1995
TI  - Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20677
ER  -