@conference{767841,
  author = {Richard Van Brunt and James Olthoff and S. Radovanov},
  title = {Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges},
  year = {1995},
  month = {1995-08-01 00:08:00},
  publisher = {Proc. XXII Intl. Conf. on Phenomena in Ionized Gases, Hoboken, NJ},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20677},
  language = {en},
}