Lysaght, P.
, Woicik, J.
, Sahiner, M.
, Song, S.
, Lee, B.
and Jammy, R.
(2008),
Incipient amporphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperatures, J Non Crystalline Solids, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854388
(Accessed December 9, 2024)