Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Incipient amporphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperatures

Published

Author(s)

Patrick S. Lysaght, Joseph Woicik, M A. Sahiner, Sanghoon Song, B -. Lee, Raj Jammy
Citation
J Non Crystalline Solids
Volume
354
Issue
2

Citation

Lysaght, P. , Woicik, J. , Sahiner, M. , Song, S. , Lee, B. and Jammy, R. (2008), Incipient amporphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperatures, J Non Crystalline Solids, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854388 (Accessed April 21, 2024)
Created January 14, 2008, Updated October 12, 2021