TY - JOUR AU - Patrick Lysaght AU - Joseph Woicik AU - M Sahiner AU - Sanghoon Song AU - B Lee AU - Raj Jammy C2 - J Non Crystalline Solids DA - 2008-01-15 00:01:00 LA - en M1 - 354 PB - J Non Crystalline Solids PY - 2008 TI - Incipient amporphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperatures UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854388 ER -