@article{836241,
  author = {Patrick Lysaght and Joseph Woicik and M Sahiner and Sanghoon Song and B Lee and Raj Jammy},
  title = {Incipient amporphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperatures},
  year = {2008},
  number = {354},
  month = {2008-01-15 00:01:00},
  publisher = {J Non Crystalline Solids},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854388},
  language = {en},
}