Improved Estimation of the Resistivity of Pure Copper Electrical Determination of Thin Copper Film Dimensions
C. E. Schuster, M Vangel, Harry A. Schafft
Improved values for the resistivity, ?, of pure, bulk copper from 50 K to 1200 K, and their confidence intervals, are developed by extending the analysis of Matula. A recommended value for d?/dT and its confidence interval in the temperature range of 290 K to 425 K is developed for use with Matthiessen's rule to calculate the electrical thickness of thin copper films and the cross-sectional area of copper lines from resistance measurements at two temperatures. Error analyses are used to estimate the uncertainty with which the electrical thickness and cross-sectional area can be determined. Values for the temperature coefficient of resistance of pure, bulk copper are also provided.
copper, electrical measurements, integrated circuits, interconnects, reliability, resisivity, film thickness
, Vangel, M.
and Schafft, H.
Improved Estimation of the Resistivity of Pure Copper Electrical Determination of Thin Copper Film Dimensions, Microelectronics Reliability
(Accessed December 4, 2023)