@article{761031,
  author = {C. Schuster and M Vangel and Harry Schafft},
  title = {Improved Estimation of the Resistivity of Pure Copper Electrical Determination of Thin Copper Film Dimensions},
  year = {2001},
  month = {2001-02-01 00:02:00},
  publisher = {Microelectronics Reliability},
  language = {en},
}