TY  - JOUR
AU  - C. Schuster
AU  - M Vangel
AU  - Harry Schafft
C2  - Microelectronics Reliability
DA  - 2001-02-01 00:02:00
LA  - en
PB  - Microelectronics Reliability
PY  - 2001
TI  - Improved Estimation of the Resistivity of Pure Copper Electrical Determination of Thin Copper Film Dimensions
ER  -