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High Temperature Reliability of Thin Film SiO2

Published

Author(s)

John S. Suehle, P Chaparala, C. Messick
Proceedings Title
Proc., 2nd International High Temperature Electronics Conference
Conference Dates
June 5-10, 1994
Conference Location
Charlotte, NC, USA

Citation

Suehle, J. , Chaparala, P. and Messick, C. (1994), High Temperature Reliability of Thin Film SiO<sub>2</sub>, Proc., 2nd International High Temperature Electronics Conference, Charlotte, NC, USA (Accessed November 29, 2023)
Created December 30, 1994, Updated October 12, 2021