TY  - CONF
AU  - Suehle, John
AU  - Chaparala, P
AU  - Messick, C.
C2  - Proc.,  2nd International High Temperature Electronics Conference, Charlotte, NC, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc.,  2nd International High Temperature Electronics Conference, Charlotte, NC, USA
PY  - 1994
TI  - High Temperature Reliability of Thin Film SiO<sub>2</sub>
ER  -