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PUBLICATIONS

High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers

Published

Author(s)

Norman A. Sanford, F Brizuela, Kristine A. Bertness

Abstract

Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of tabletop zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
Citation
Journal of Physics Conference Proceedings
Volume
86
Issue
1
Pub Type
Journals

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Keywords

GaN nanowires, nano-mechanics, nano-mechanical resonators, electro-mechanical resonators, piezoresistivity
Manufacturing and Nanomaterials

Citation

Sanford, N. , Brizuela, F. and Bertness, K. (2008), High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers, Journal of Physics Conference Proceedings, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908697 (Accessed October 13, 2025)

Issues

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Created July 21, 2008, Updated February 19, 2017
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