High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
Norman A. Sanford, F Brizuela, Kristine A. Bertness
Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of tabletop zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
, Brizuela, F.
and Bertness, K.
High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers, Journal of Physics Conference Proceedings, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908697
(Accessed December 3, 2023)