Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers

Published

Author(s)

Norman A. Sanford, F Brizuela, Kristine A. Bertness

Abstract

Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of tabletop zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
Citation
Journal of Physics Conference Proceedings
Volume
86
Issue
1

Keywords

GaN nanowires, nano-mechanics, nano-mechanical resonators, electro-mechanical resonators, piezoresistivity

Citation

Sanford, N. , Brizuela, F. and Bertness, K. (2008), High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers, Journal of Physics Conference Proceedings, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908697 (Accessed November 6, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created July 21, 2008, Updated February 19, 2017