Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

High refractive index immersion fluids for 193 nm immersion lithography

Published

Author(s)

B Budhlall, G Parris, P Zhang, X Gao, Z Zarkov, B Ross, Simon G. Kaplan, J Burnett
Citation
SPIE
Volume
5754

Citation

Budhlall, B. , Parris, G. , Zhang, P. , Gao, X. , Zarkov, Z. , Ross, B. , Kaplan, S. and Burnett, J. (2005), High refractive index immersion fluids for 193 nm immersion lithography, SPIE (Accessed May 29, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2004, Updated October 12, 2021