@article{805536,
  author = {B Budhlall and G Parris and P Zhang and X Gao and Z Zarkov and B Ross and Simon Kaplan and J Burnett},
  title = {High refractive index immersion fluids for 193 nm immersion lithography},
  year = {2005},
  number = {5754},
  month = {2005-01-01 00:01:00},
  publisher = {SPIE},
  language = {en},
}