Kaplan, S.
, Burnett, J.
, Shirley, E.
, Horowitz, D.
, Clauss, W.
, Grenville, A.
and Van, C.
(2006),
High index optical materials for 193 nm immersion lithography, SPIE (Accessed September 13, 2026)
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High index optical materials for 193 nm immersion lithography
Published
Author(s)
, J H. Burnett, , D Horowitz, W Clauss, A Grenville, C Van peski
Citation
SPIE
Volume
6154
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 2006, Updated February 17, 2017