@article{128056,
  author = {Simon Kaplan and J Burnett and Eric Shirley and D Horowitz and W Clauss and A Grenville and C Van},
  title = {High index optical materials for 193 nm immersion lithography},
  year = {2006},
  number = {6154},
  month = {2006-01-01},
  publisher = {SPIE},
  language = {en},
}