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High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces

Published

Author(s)

Nhan Van Nguyen, Deane Chandler-Horowitz, Joseph G. Pellegrino, Paul M. Amirtharaj
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA

Citation

Nguyen, N. , Chandler-Horowitz, D. , Pellegrino, J. and Amirtharaj, P. (1995), High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA (Accessed June 21, 2024)

Issues

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Created December 30, 1995, Updated October 12, 2021