Nguyen, N.
, Chandler-Horowitz, D.
, Pellegrino, J.
and Amirtharaj, P.
(1995),
High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA
(Accessed April 18, 2024)
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High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces
Published
Author(s)
, , Joseph G. Pellegrino,
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Created December 30, 1995, Updated October 12, 2021