Nguyen, N.
, Chandler-Horowitz, D.
, Pellegrino, J.
and Amirtharaj, P.
(1995),
High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA
(Accessed October 4, 2024)
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High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces
Published
Author(s)
, , Joseph G. Pellegrino,
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1995, Updated October 12, 2021