TY  - CONF
AU  - Nhan Nguyen
AU  - Deane Chandler-Horowitz
AU  - Joseph Pellegrino
AU  - Paul Amirtharaj
C2  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
PY  - 1995
TI  - High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces
ER  -