@conference{846006,
  author = {Nhan Nguyen and Deane Chandler-Horowitz and Joseph Pellegrino and Paul Amirtharaj},
  title = {High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA},
  language = {en},
}