Grain Orientation Mapping of Graphene in a Scanning Electron Microscope

Published: May 01, 2019

Author(s)

Benjamin W. Caplins, Jason D. Holm, Robert R. Keller

Abstract

A scanning transmission electron diffraction method is developed for use in the scanning electron microscope to perform orientational imaging microscopy of 2D materials. The method can generate grain orientational maps of monolayer graphene over a field of view up to ~50 um in just a few minutes and can distinguish twisted bilayers from aligned bilayers. This method holds promise to bring electron diffraction based orientation measurements of 2D materials to a broader audience.
Citation: Carbon
Volume: 149
Pub Type: Journals

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Created May 01, 2019, Updated May 09, 2019