Grain Orientation Mapping of Graphene in a Scanning Electron Microscope
Benjamin W. Caplins, Jason D. Holm, Robert R. Keller
A scanning transmission electron diffraction method is developed for use in the scanning electron microscope to perform orientational imaging microscopy of 2D materials. The method can generate grain orientational maps of monolayer graphene over a field of view up to ~50 um in just a few minutes and can distinguish twisted bilayers from aligned bilayers. This method holds promise to bring electron diffraction based orientation measurements of 2D materials to a broader audience.