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Gradient Reference Specimens for Advanced Scanned Probe Microscopy

Published

Author(s)

D Julthongpiput, Michael J. Fasolka, Eric J. Amis

Abstract

Recent years have seen the emergence of a new generation of SPM techniques, which intend to measure chemical, mechanical, and electro/optical properties on the nanoscale. Currently, these techniques provide qualitative (or semi-quantitative) data, often expressed in terms of relative instrument parameters (e.g. piezo voltage or cantilever response. In this article, we will describe our research at NIST, which aims to produce reference specimens that help calibrate these more complex SPM techniques.
Citation
Microscopy and Microanalysis
Volume
12
Issue
No. 4

Keywords

AFM, combinatorial, gradient patterns, high-throughput, reference specimens, scanned probe microscopy, SPM

Citation

Julthongpiput, D. , Fasolka, M. and Amis, E. (2004), Gradient Reference Specimens for Advanced Scanned Probe Microscopy, Microscopy and Microanalysis, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852335 (Accessed April 21, 2024)
Created July 1, 2004, Updated February 19, 2017