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Generalized ellipsometry of artificially designed line width roughness



Martin Foldyna, Thomas A. Germer, Brent Bergner, Ronald G. Dixson


We use azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using 1D and 2D rigorous coupled-wave methods in order to evaluate sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile.
Thin Solid Films


biperiodic gratings, diffraction gratings, ellipsometry, line width roughness, Mueller matrix, multi-azimuth method, RCWA


Foldyna, M. , Germer, T. , Bergner, B. and Dixson, R. (2010), Generalized ellipsometry of artificially designed line width roughness, Thin Solid Films, [online], (Accessed July 24, 2024)


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Created December 10, 2010, Updated February 19, 2017