@article{42226,
  author = {Martin Foldyna and Thomas Germer and Brent Bergner and Ronald Dixson},
  title = {Generalized ellipsometry of artificially designed line width roughness},
  year = {2010},
  number = {519},
  month = {2010-12-10},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906239},
  language = {en},
}