TY - JOUR AU - Martin Foldyna AU - Thomas Germer AU - Brent Bergner AU - Ronald Dixson C2 - Thin Solid Films DA - 2010-12-10 LA - en M1 - 519 PB - Thin Solid Films PY - 2010 TI - Generalized ellipsometry of artificially designed line width roughness UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906239 ER -