NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Frequency-Dependent Charge-Pumping: The Depth Question Revisited
Published
Author(s)
Fan Zhang, Kin P. Cheung, Jason Campbell, John S. Suehle
Abstract
A popular defect depth-profiling technique, frequency-dependent charge-pumping is carefully re-examined. Without complicated math of modeling, the physics behind the technique is examined clearly. It is shown that there is no unique relationship between the measurement frequency and the probed depth. The conclusion is that frequency-dependent charge-pumping is not a defect depth-profiling technique.
Proceedings Title
IEEE International Reliability Physics Symposium Proceedings
Zhang, F.
, Cheung, K.
, Campbell, J.
and Suehle, J.
(2010),
Frequency-Dependent Charge-Pumping: The Depth Question Revisited, IEEE International Reliability Physics Symposium Proceedings, Anaheim, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904997
(Accessed October 9, 2025)