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Frequency-Dependent Charge-Pumping: The Depth Question Revisited



Fan Zhang, Kin P. Cheung, Jason Campbell, John S. Suehle


A popular defect depth-profiling technique, frequency-dependent charge-pumping is carefully re-examined. Without complicated math of modeling, the physics behind the technique is examined clearly. It is shown that there is no unique relationship between the measurement frequency and the probed depth. The conclusion is that frequency-dependent charge-pumping is not a defect depth-profiling technique.
Proceedings Title
IEEE International Reliability Physics Symposium Proceedings
Conference Dates
May 2-6, 2010
Conference Location
Anaheim, CA, US


frequency-dependent, charge-pumping, defect, depth profiling


Zhang, F. , Cheung, K. , Campbell, J. and Suehle, J. (2010), Frequency-Dependent Charge-Pumping: The Depth Question Revisited, IEEE International Reliability Physics Symposium Proceedings, Anaheim, CA, US, [online], (Accessed June 21, 2024)


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Created April 30, 2010, Updated October 12, 2021