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A framework for standard modular simulation ::application to semiconductor wafer fabrication

Published

Author(s)

Heshan Li, Jose A Ramirez-Hernandez, Emmanuel Fernandez, Charles R McLean, Swee Leong
Citation
- NIST IR 7236
Report Number
NIST IR 7236

Citation

Li, H. , Ramirez-Hernandez, J. , Fernandez, E. , McLean, C. and Leong, S. (2005), A framework for standard modular simulation ::application to semiconductor wafer fabrication, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7236 (Accessed April 19, 2024)
Created January 1, 2005, Updated May 20, 2023