@misc{1139791,
  author = {Heshan Li and Jose A Ramirez-Hernandez and Emmanuel Fernandez and Charles R McLean and Swee Leong},
  title = {A framework for standard modular simulation ::application to semiconductor wafer fabrication},
  year = {2005},
  month = {2005-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7236},
  language = {en},
}