TY  - GEN
AU  - Heshan Li
AU  - Jose A Ramirez-Hernandez
AU  - Emmanuel Fernandez
AU  - Charles R McLean
AU  - Swee Leong
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7236
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - A framework for standard modular simulation ::application to semiconductor wafer fabrication
ER  -