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A Framework for Semiconductor Manufacturing



Brian Catron


Manufacturers confront a common problem of integrating a factory with components from multiple vendors. Ever changing market demands compound integration problems by requiring flexibility in manufacturing. The Automated Manufacturing Research Facility (AMRF) at the National Bureau of Standards (NBS) is investigating integration and flexibility issues in computer integrated manufacturing of machined parts. Researchers at the AMRF have successfully integrated a wide variety of off-the-shelf components into a single consolidated factory while maintaining a high degree of flexibility in processing. The AMRF factory is based on data driven intelligent controllers within a distributed hierarchical architecture. This paper outlines the framework of the AMRF factory and discusses each of the components as they apply to semiconductor manufacturing control.
Proceedings Title
Proceedings of the 3rd DARPASCR CIM-CI Workshop
Conference Dates
August 1, 1988
Conference Location
Stanford, CA, USA


frameword, manufacturing integration, semiconductor


Catron, B. (1988), A Framework for Semiconductor Manufacturing, Proceedings of the 3rd DARPASCR CIM-CI Workshop, Stanford, CA, USA, [online], (Accessed May 19, 2024)


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Created July 31, 1988, Updated October 12, 2021