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A Framework for Semiconductor Manufacturing

Published

Author(s)

Brian Catron

Abstract

Manufacturers confront a common problem of integrating a factory with components from multiple vendors. Ever changing market demands compound integration problems by requiring flexibility in manufacturing. The Automated Manufacturing Research Facility (AMRF) at the National Bureau of Standards (NBS) is investigating integration and flexibility issues in computer integrated manufacturing of machined parts. Researchers at the AMRF have successfully integrated a wide variety of off-the-shelf components into a single consolidated factory while maintaining a high degree of flexibility in processing. The AMRF factory is based on data driven intelligent controllers within a distributed hierarchical architecture. This paper outlines the framework of the AMRF factory and discusses each of the components as they apply to semiconductor manufacturing control.
Proceedings Title
Proceedings of the 3rd DARPASCR CIM-CI Workshop
Conference Dates
August 1, 1988
Conference Location
Stanford, CA, USA

Keywords

frameword, manufacturing integration, semiconductor

Citation

Catron, B. (1988), A Framework for Semiconductor Manufacturing, Proceedings of the 3rd DARPASCR CIM-CI Workshop, Stanford, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821061 (Accessed June 10, 2023)
Created July 31, 1988, Updated October 12, 2021