@conference{775136,
  author = {Brian Catron},
  title = {A Framework for Semiconductor Manufacturing},
  year = {1988},
  month = {1988-08-01 00:08:00},
  publisher = {Proceedings of the 3rd DARPASCR CIM-CI Workshop, Stanford, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821061},
  language = {en},
}