TY  - CONF
AU  - Brian Catron
C2  - Proceedings of the 3rd DARPASCR CIM-CI Workshop, Stanford, CA, USA
DA  - 1988-08-01 00:08:00
LA  - en
PB  - Proceedings of the 3rd DARPASCR CIM-CI Workshop, Stanford, CA, USA
PY  - 1988
TI  - A Framework for Semiconductor Manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821061
ER  -