Mattis, R.
and Buehler, M.
(1983),
A FORTRAN program for analysis of data from microelectronic test structures:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-75
(Accessed April 25, 2024)
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A FORTRAN program for analysis of data from microelectronic test structures:
Published
Author(s)
,
Citation
- NBS SP 400-75
Report Number
NBS SP 400-75
Pub Type
NIST Pubs
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Created January 1, 1983, Updated May 19, 2023