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A FORTRAN program for analysis of data from microelectronic test structures:

Published

Author(s)

Richard L Mattis, Martin G Buehler
Citation
- NBS SP 400-75
Report Number
NBS SP 400-75

Citation

Mattis, R. and Buehler, M. (1983), A FORTRAN program for analysis of data from microelectronic test structures:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-75 (Accessed April 14, 2024)
Created January 1, 1983, Updated May 19, 2023