TY  - GEN
AU  - Richard L Mattis
AU  - Martin G Buehler
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1983-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-75
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1983
TI  - A FORTRAN program for analysis of data from microelectronic test structures:
ER  -