@misc{1161646,
  author = {Richard L Mattis and Martin G Buehler},
  title = {A FORTRAN program for analysis of data from microelectronic test structures:},
  year = {1983},
  month = {1983-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-75},
  language = {en},
}