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Factors influencing the quality of a-Si:H films deposited by the 'hot wire' technique

Published

Author(s)

E C. Molenbroek, A H. Mahan, E J. Johnson, A C. Gallagher
Citation
Proc Materials Research Society
Volume
336

Citation

Molenbroek, E. , Mahan, A. , Johnson, E. and Gallagher, A. (1994), Factors influencing the quality of a-Si:H films deposited by the 'hot wire' technique, Proc Materials Research Society (Accessed February 22, 2024)
Created January 1, 1994, Updated February 17, 2017