@article{115886,
  author = {E Molenbroek and A Mahan and E Johnson and A Gallagher},
  title = {Factors influencing the quality of a-Si:H films deposited by the 'hot wire' technique},
  year = {1994},
  number = {336},
  month = {1994-01-01},
  publisher = {Proc Materials Research Society},
  language = {en},
}