TY  - JOUR
AU  - E Molenbroek
AU  - A Mahan
AU  - E Johnson
AU  - A Gallagher
C2  - Proc Materials Research Society
DA  - 1994-01-01
LA  - en
M1  - 336
PB  - Proc Materials Research Society
PY  - 1994
TI  - Factors influencing the quality of a-Si:H films deposited by the 'hot wire' technique
ER  -