Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels

Published

Author(s)

A. Rasmussen, Michael Gaitan, Laurie E. Locascio, Mona E. Zaghloul
Citation
Journal of Microelectromechanical Systems
Volume
10
Issue
2

Citation

Rasmussen, A. , Gaitan, M. , Locascio, L. and Zaghloul, M. (2001), Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels, Journal of Microelectromechanical Systems (Accessed April 19, 2024)
Created June 1, 2001, Updated February 19, 2017