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Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels

Published

Author(s)

A. Rasmussen, Michael Gaitan, Laurie E. Locascio, Mona E. Zaghloul
Citation
Journal of Microelectromechanical Systems
Volume
10
Issue
2

Citation

Rasmussen, A. , Gaitan, M. , Locascio, L. and Zaghloul, M. (2001), Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels, Journal of Microelectromechanical Systems (Accessed May 23, 2024)

Issues

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Created June 1, 2001, Updated February 19, 2017