@article{66546,
  author = {A. Rasmussen and Michael Gaitan and Laurie Locascio and Mona Zaghloul},
  title = {Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels},
  year = {2001},
  number = {10},
  month = {2001-06-01},
  publisher = {Journal of Microelectromechanical Systems},
  language = {en},
}