Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation
Thomas Michels, Ivo Rangelow, Vladimir Aksyuk
This article reports a process for batch fabrication of a fiber pigtailed optomechanical transducer platform with overhanging cantilevers. The process combines nanophotonic, mechanical, and electrical elements with a combination of surface and bulk micromachining. This article guides through the whole fabrication process and explains critical steps and process choices in detail. Possible alternative fabrication techniques and problems are discussed. The fabrication process consists of electron beam lithography, i-line stepper lithography, and back- and frontside mask aligner lithography. An important attribute of this article is that the description of this fabrication process is very comprehensive, presenting context and details which are highly relevant to the rational implementation and reliable repetition of the process. Moreover, this process makes use of equipment commonly found in nanofabrication facilities and research laboratories, facilitating the broad adaptation and application of the process. Therefore, while this article specifically informs users of the Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), we anticipate that this information will be generally useful for the nano- and microfabrication research communities at large.
, Rangelow, I.
and Aksyuk, V.
Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/jres.121.028, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921850
(Accessed June 7, 2023)