TY  - GEN
AU  - Thomas Michels
AU  - Ivo Rangelow
AU  - Vladimir Aksyuk
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2016-12-08 00:12:00
DO  - https://doi.org/10.6028/jres.121.028
LA  - en
M1  - 121
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2016
TI  - Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921850
ER  -