@misc{801661, author = {Thomas Michels and Ivo Rangelow and Vladimir Aksyuk}, title = {Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation}, year = {2016}, number = {121}, month = {2016-12-08 00:12:00}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921850}, doi = {https://doi.org/10.6028/jres.121.028}, language = {en}, }