Peters, P.
, Hoover, R.
, Watts, R.
, Tarrio, C.
and Walker, A.
(1995),
Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,, Proc. SPIE 2515 , , 1, CA
(Accessed April 26, 2024)
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Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,
Published
Author(s)
P N. Peters, , , , A. Walker
Volume
2515
Conference Dates
January 1-30, 1995
Conference Location
, 1, CA
Conference Title
Proc. SPIE 2515
Pub Type
Conferences
Citation
Created December 31, 1994, Updated October 12, 2021