TY  - CONF
AU  - Peters, P
AU  - Hoover, Richard
AU  - Watts, R
AU  - Tarrio, Charles
AU  - Walker, A.
C2  - Proc. SPIE 2515 , , 1, CA
DA  - 1995-01-01 00:01:00
LA  - en
M1  - 2515
PB  - Proc. SPIE 2515 , , 1, CA
PY  - 1995
TI  - Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,
ER  -