@conference{804196,
  author = {P Peters and Richard Hoover and R Watts and Charles Tarrio and A. Walker},
  title = {Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,},
  year = {1995},
  number = {2515},
  month = {1995-01-01 00:01:00},
  publisher = {Proc. SPIE 2515 , , 1, CA},
  language = {en},
}