Peters, P.
, Hoover, R.
, Watts, R.
, Tarrio, C.
and Walker, A.
(1995),
Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,, Proc. SPIE 2515 , , 1, CA
(Accessed December 4, 2024)