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Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,

Published

Author(s)

P N. Peters, Richard B. Hoover, R N. Watts, Charles Tarrio, A. Walker
Volume
2515
Conference Dates
January 1-30, 1995
Conference Location
, 1, CA
Conference Title
Proc. SPIE 2515

Citation

Peters, P. , Hoover, R. , Watts, R. , Tarrio, C. and Walker, A. (1995), Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,, Proc. SPIE 2515 , , 1, CA (Accessed February 26, 2024)
Created December 31, 1994, Updated October 12, 2021